RF MEMS Switches and Switch Matrices
نویسندگان
چکیده
RF-MEMS technology has the potential of replacing many of the mechanical and semiconductor switches used in mobile and satellite communication systems. In many cases, such RF-MEMS switches would not only reduce substantially the size and power consumption, but also promise superior performance. The paper reviews the recent development of RF MEMS switches and switch matrices. Several configurations are presented for multi-port RFMEMS switches including R-Type switches. The paper also addresses the design and fabrication of monolithic RFMEMS switch matrices
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